Repair of digital micromirror device having white defects

Details Repair of digital micromirror device having white defects Repair of digital micromirror device having white defects

1995-01-10

1997-04-01

Henry, Jon W.

Optical: systems and elements

Deflection using a moving element

With particular mount or drive for element

359224, 359225, 359291, 359855, 359900, 345108, G09G 334, G02B 2608

Patent

active

056172427

ABSTRACT:
A method of repairing mirror elements of a digital micromirror device (DMD) that have become stuck in an "on" position. The mirror element (10) is located and targeted with a laser beam. The wavelength, pulse duration, and power of the radiation is selected so that the mirror component (11) of the defective mirror element (10) will be ablated without affecting the underlying circuitry or neighboring mirror elements (10).

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5289172 (1994-02-01), Gale, Jr. et al.
patent: 5387924 (1995-02-01), Gale, Jr. et al.
patent: 5412186 (1995-05-01), Gale
patent: 5444566 (1995-08-01), Gale et al.
patent: 5482564 (1996-01-01), Douglas et al.
patent: 5504504 (1996-04-01), Markandey et al.

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