Electricity: measuring and testing – Magnetic – Magnetometers
Reexamination Certificate
2011-03-01
2011-03-01
LeDynh, Bot L (Department: 2858)
Electricity: measuring and testing
Magnetic
Magnetometers
C324S207210, C324S249000, C428S692100, C428S693100
Reexamination Certificate
active
07898249
ABSTRACT:
Methods of reorienting ferromagnetic layers of a plurality of magnetoresistive elements and structures formed by the methods. The plurality of magnetoresistive elements, preferably GMR multilayer elements, are manufactured and arranged on a planar substrate. The method effectively allows selective orientation and reorientation of distinct ferromagnetic layers of a subset of the magnetoresistive elements on the substrate. The methods make either use of subsequent annealing processes making use of magnetic fields pointing in different directions. Prior to application of a subsequent annealing process, a complimentary subset of magnetoresistive elements is effectively shielded by selective deposition of a soft-magnetic shielding layer. Alternatively, a single annealing process can be performed when an externally applied magnetic field is locally modified by soft-magnetic structures, such as fluxguides.
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Paul Johannes
Schaefer Rolf
International Business Machines - Corporation
Ledynh Bot L
Zilka-Kotab, PC
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