Rendering a mask using coarse mask representation

Details Rendering a mask using coarse mask representation Rendering a mask using coarse mask representation

2008-01-16

2011-12-06

Kassa, Yosef (Department: 2624)

Image analysis

Image transformation or preprocessing

Selecting a portion of an image

C382S274000, C382S275000, C358S003260, C358S003270

Reexamination Certificate

active

08073288

ABSTRACT:
A method, system and computer program product for rendering a mask are disclosed. A method of rendering a mask may comprise: providing an initial mask design for a photolithographic process, the initial mask design including polygons; initially rendering the initial mask design as a coarse mask representation in a pixel based image calculation; identifying an overhang portion; and rendering the overhang portion using a set of subpixels whose artifacts from spatial-localization lie outside a practical resolution of a pseudo lens having a numerical aperture larger than that of a projection lens used in the photolithographic process; and updating the initial rendering based on the overhang portion rendering.

REFERENCES:
patent: 6944354 (2005-09-01), Groschup et al.
patent: 6945928 (2005-09-01), Kobayashi et al.
patent: 7079219 (2006-07-01), Kanno
patent: 7155698 (2006-12-01), Gennari
patent: 7261415 (2007-08-01), Chernyak
patent: 7433017 (2008-10-01), Hirayanagi et al.
patent: 7458683 (2008-12-01), Chernyak
patent: 2005/0091631 (2005-04-01), Gallatin et al.
patent: 2007/0022402 (2007-01-01), Ye et al.
patent: 2007/0226677 (2007-09-01), Gallatin et al.
Liu et al., “A New Polygon Based Algorithm for Filling Regions,” Tamkang Journal of Science and Engineering, vol. 2, No. 4, 2000, pp. 175-186.
Search Report and Written Opinion US2009/030934.

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