Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-10-24
2006-10-24
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S129000, C700S169000, C707S793000
Reexamination Certificate
active
07127320
ABSTRACT:
A method for managing recipes in a semiconductor manufacturing process which includes resolving a recipe to provide a resolved recipe using a configuration for a current context and rendering the recipe to provide a rendered recipe. The rendered recipe corresponds to a format suitable for consumption by an equipment interface of the semiconductor manufacturing process.
REFERENCES:
patent: 6035293 (2000-03-01), Lantz et al.
patent: 6430572 (2002-08-01), Steffan et al.
patent: 6629002 (2003-09-01), Holder
Brown Russell Clinton
Felber Achim
Jackson Thomas P.
Savage, II Ronald Ivan
Advanced Micro Devices , Inc.
Hamilton & Terrile LLP
Masinick Michael D.
Picard Leo
Terrile Stephen A.
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