Render-resolve method of obtaining configurations and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S129000, C700S169000, C707S793000

Reexamination Certificate

active

07127320

ABSTRACT:
A method for managing recipes in a semiconductor manufacturing process which includes resolving a recipe to provide a resolved recipe using a configuration for a current context and rendering the recipe to provide a rendered recipe. The rendered recipe corresponds to a format suitable for consumption by an equipment interface of the semiconductor manufacturing process.

REFERENCES:
patent: 6035293 (2000-03-01), Lantz et al.
patent: 6430572 (2002-08-01), Steffan et al.
patent: 6629002 (2003-09-01), Holder

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