Etching a substrate: processes – Forming or treating electrical conductor article
Reexamination Certificate
2008-06-17
2008-06-17
Olsen, Allan (Department: 1792)
Etching a substrate: processes
Forming or treating electrical conductor article
C216S063000, C216S078000, C205S640000, C257SE21252
Reexamination Certificate
active
07387738
ABSTRACT:
The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate.
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Arslanian Gregory Khosrov
Dong Chun Christine
McDermott Wayne Thomas
Patrick Richard E.
Schwarz Alexander
Air Products and Chemicals Inc.
Morris-Oskanian Rosaleen P.
Olsen Allan
Rossi Joseph D.
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