Removal of surface contaminants by irradiation from a high-energ

Details Removal of surface contaminants by irradiation from a high-energ Removal of surface contaminants by irradiation from a high-energ

1988-07-08

1991-06-18

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 19, 437907, 437908, 437939, 437942, 437946, 148DIG17, 148DIG91, 148DIG93, 134 1, H01L 21268

Patent

active

050249681

ABSTRACT:
A method and apparatus for removing surface contaminants from the surface of a substrate by high-energy irradiation is provided. The invention enables removal of surface contaminants without altering of the substrate's underlying molecular structure. The source of high-energy irradiation may comprise a pulsed laser.

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