Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1987-05-18
1988-04-05
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 98, G03C 500
Patent
active
047358203
ABSTRACT:
Residual catalyst is removed from a dielectric substrate by exposing the substrate to a plasma formed from an inert gas.
REFERENCES:
patent: 4214966 (1980-07-01), Mahoney
patent: 4357369 (1982-11-01), Kilichowski et al.
patent: 4545851 (1985-10-01), Takada
patent: 4568562 (1986-02-01), Phillips
patent: 4585668 (1986-04-01), Asmussen et al.
patent: 4610910 (1986-09-01), Kawamoto et al.
Agostino Peter A.
Babu Suryadevara V.
Hoffarth Joseph G.
International Business Machines - Corporation
Newsome John H.
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