Removal of photoresist and photoresist residue from...

Details Removal of photoresist and photoresist residue from... Removal of photoresist and photoresist residue from...

2005-03-29

2005-03-29

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S111000, C134S186000, C134S200000, C134S902000

Reexamination Certificate

active

06871656

ABSTRACT:
A method of removing a photoresist or a photoresist residue from a semiconductor substrate is disclosed. The semiconductor substrate with the photoresist or the photoresist residue on a surface of the semiconductor substrate is placed within a pressure chamber. The pressure chamber is then pressurized. Supercritical carbon dioxide and a stripper chemical are introduced to the pressure chamber. The supercritical carbon dioxide and the stripper chemical are maintained in contact with the photoresist or the photoresist residue until the photoresist or the photoresist residue is removed from the semiconductor substrate. The pressure chamber is then flushed and vented.

REFERENCES:
patent: 2617719 (1952-11-01), Stewart
patent: 2625886 (1953-01-01), Browne
patent: 3744660 (1973-07-01), Gaines et al.
patent: 3890176 (1975-06-01), Bolon
patent: 3900551 (1975-08-01), Bardoncelli et al.
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4029517 (1977-06-01), Rand
patent: 4091643 (1978-05-01), Zucchini
patent: 4219333 (1980-08-01), Harris
patent: 4245154 (1981-01-01), Uehara et al.
patent: 4341592 (1982-07-01), Shortes et al.
patent: 4355937 (1982-10-01), Mack et al.
patent: 4367140 (1983-01-01), Wilson
patent: 4406596 (1983-09-01), Budde
patent: 4422651 (1983-12-01), Platts
patent: 4474199 (1984-10-01), Blaudszun
patent: 4475993 (1984-10-01), Blander et al.
patent: 4522788 (1985-06-01), Sitek et al.
patent: 4549467 (1985-10-01), Wilden et al.
patent: 4592306 (1986-06-01), Gallego
patent: 4601181 (1986-07-01), Privat
patent: 4626509 (1986-12-01), Lyman
patent: 4670126 (1987-06-01), Messer et al.
patent: 4682937 (1987-07-01), Credle, Jr.
patent: 4693777 (1987-09-01), Hazano et al.
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4778356 (1988-10-01), Hicks
patent: 4788043 (1988-11-01), Kagiyama et al.
patent: 4789077 (1988-12-01), Noe
patent: 4823976 (1989-04-01), White, III et al.
patent: 4825808 (1989-05-01), Takahashi et al.
patent: 4827867 (1989-05-01), Takei et al.
patent: 4838476 (1989-06-01), Rahn
patent: 4865061 (1989-09-01), Fowler et al.
patent: 4877530 (1989-10-01), Moses
patent: 4879004 (1989-11-01), Oesch et al.
patent: 4879431 (1989-11-01), Bertoncini
patent: 4917556 (1990-04-01), Stark et al.
patent: 4923828 (1990-05-01), Gluck et al.
patent: 4924892 (1990-05-01), Kiba et al.
patent: 4933404 (1990-06-01), Beckman et al.
patent: 4944837 (1990-07-01), Nishikawa et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4960140 (1990-10-01), Ishijima et al.
patent: 4983223 (1991-01-01), Gessner
patent: 5011542 (1991-04-01), Weil
patent: 5013366 (1991-05-01), Jackson et al.
patent: 5044871 (1991-09-01), Davis et al.
patent: 5062770 (1991-11-01), Story et al.
patent: 5068040 (1991-11-01), Jackson
patent: 5071485 (1991-12-01), Matthews et al.
patent: 5105556 (1992-04-01), Kurokawa et al.
patent: 5143103 (1992-09-01), Basso et al.
patent: 5158704 (1992-10-01), Fulton et al.
patent: 5167716 (1992-12-01), Boitnott et al.
patent: 5169296 (1992-12-01), Wilden
patent: 5169408 (1992-12-01), Biggerstaff et al.
patent: 5174917 (1992-12-01), Monzyk
patent: 5185058 (1993-02-01), Cathey, Jr.
patent: 5185296 (1993-02-01), Morita et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5188515 (1993-02-01), Horn
patent: 5190373 (1993-03-01), Dickson et al.
patent: 5191993 (1993-03-01), Wanger et al.
patent: 5193560 (1993-03-01), Tanaka et al.
patent: 5195878 (1993-03-01), Sahiavo et al.
patent: 5201960 (1993-04-01), Starov
patent: 5213485 (1993-05-01), Wilden
patent: 5213619 (1993-05-01), Jackson et al.
patent: 5215592 (1993-06-01), Jackson
patent: 5217043 (1993-06-01), Novakovic
patent: 5221019 (1993-06-01), Pechacek et al.
patent: 5222876 (1993-06-01), Budde
patent: 5224504 (1993-07-01), Thompson et al.
patent: 5225173 (1993-07-01), Wai
patent: 5236602 (1993-08-01), Jackson
patent: 5236669 (1993-08-01), Simmons et al.
patent: 5237824 (1993-08-01), Pawliszyn
patent: 5238671 (1993-08-01), Matson et al.
patent: 5240390 (1993-08-01), Kvinge et al.
patent: 5243821 (1993-09-01), Schuck et al.
patent: 5246500 (1993-09-01), Samata et al.
patent: 5250078 (1993-10-01), Saus et al.
patent: 5251776 (1993-10-01), Morgan, Jr. et al.
patent: 5261965 (1993-11-01), Moslehi
patent: 5266205 (1993-11-01), Fulton et al.
patent: 5267455 (1993-12-01), Dewees et al.
patent: 5269815 (1993-12-01), Schlenker et al.
patent: 5274129 (1993-12-01), Natale et al.
patent: 5280693 (1994-01-01), Heudecker
patent: 5285352 (1994-02-01), Pastore et al.
patent: 5288333 (1994-02-01), Tanaka et al.
patent: 5290361 (1994-03-01), Hayashida et al.
patent: 5294261 (1994-03-01), McDermott et al.
patent: 5298032 (1994-03-01), Schlenker et al.
patent: 5304515 (1994-04-01), Morita et al.
patent: 5306350 (1994-04-01), Hoy et al.
patent: 5312882 (1994-05-01), DeSimone et al.
patent: 5313965 (1994-05-01), Palen
patent: 5314574 (1994-05-01), Takahashi
patent: 5316591 (1994-05-01), Chao et al.
patent: 5328722 (1994-07-01), Ghanayem et al.
patent: 5334332 (1994-08-01), Lee
patent: 5334493 (1994-08-01), Fujita et al.
patent: 5337446 (1994-08-01), Smith et al.
patent: 5339844 (1994-08-01), Stanford, Jr. et al.
patent: 5352327 (1994-10-01), Witowski
patent: 5355901 (1994-10-01), Mielnik et al.
patent: 5356538 (1994-10-01), Wai et al.
patent: 5364497 (1994-11-01), Chau et al.
patent: 5368171 (1994-11-01), Jackson
patent: 5370740 (1994-12-01), Chao et al.
patent: 5370741 (1994-12-01), Bergman
patent: 5370742 (1994-12-01), Mitchell et al.
patent: 5377705 (1995-01-01), Smith, Jr. et al.
patent: 5401322 (1995-03-01), Marshall
patent: 5403621 (1995-04-01), Jackson et al.
patent: 5403665 (1995-04-01), Alley et al.
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5412958 (1995-05-01), Iliff et al.
patent: 5417768 (1995-05-01), Smith, Jr. et al.
patent: 5433334 (1995-07-01), Reneau
patent: 5447294 (1995-09-01), Sakata et al.
patent: 5456759 (1995-10-01), Stanford, Jr. et al.
patent: 5470393 (1995-11-01), Fukazawa
patent: 5474812 (1995-12-01), Truckenmuller et al.
patent: 5482564 (1996-01-01), Douglas et al.
patent: 5486212 (1996-01-01), Mitchell et al.
patent: 5494526 (1996-02-01), Paranjpe
patent: 5500081 (1996-03-01), Bergman
patent: 5501761 (1996-03-01), Evans et al.
patent: 5503176 (1996-04-01), Dunmire et al.
patent: 5505219 (1996-04-01), Lansberry et al.
patent: 5509431 (1996-04-01), Smith, Jr. et al.
patent: 5514220 (1996-05-01), Wetmore et al.
patent: 5522938 (1996-06-01), O'Brien
patent: 5526834 (1996-06-01), Mielnik et al.
patent: 5533538 (1996-07-01), Marshall
patent: 5547774 (1996-08-01), Gimzewski et al.
patent: 5550211 (1996-08-01), DeCrosta et al.
patent: 5571330 (1996-11-01), Kyogoku
patent: 5580846 (1996-12-01), Hayashida et al.
patent: 5589082 (1996-12-01), Lin et al.
patent: 5589105 (1996-12-01), DeSimone et al.
patent: 5589224 (1996-12-01), Tepman et al.
patent: 5621982 (1997-04-01), Yamashita et al.
patent: 5629918 (1997-05-01), Ho et al.
patent: 5632847 (1997-05-01), Ohno et al.
patent: 5635463 (1997-06-01), Muraoka
patent: 5637151 (1997-06-01), Schulz
patent: 5641887 (1997-06-01), Beckman et al.
patent: 5644855 (1997-07-01), McDermott et al.
patent: 5649809 (1997-07-01), Stapelfeldt
patent: 5656097 (1997-08-01), Olesen et al.
patent: 5665527 (1997-09-01), Allen et al.
patent: 5669251 (1997-09-01), Townsend et al.
patent: 5676705 (1997-10-01), Jureller et al.
patent: 5679169 (1997-10-01), Gonzales et al.
patent: 5679171 (1997-10-01), Saga et al.
patent: 5683473 (1997-11-01), Jureller et al.
patent: 5683977 (1997-11-01), Jureller et al.
patent: 5688879 (1997-11-01), DeSimone
patent: 5700379 (1997-12-01), Biebl
patent: 5702228 (1997-12-01), Tamai et al.
patent: 5706319 (1998-01-01), Holtz
patent: 5726211 (1998-03-01), Hedrick et al.
patent: 5730874 (1998-03-01), Wai et al.
patent: 5739223 (1998-04-01), DeSimone
patent: 5746008 (1998-05-01), Yamashita et al.
patent: 5769588 (1998-06-01), Toshima et al.
patent: 5783082 (1998-07-01), DeSimone et al.
patent: 5797719 (1998-08-01), James et al.
patent: 5798126 (1998-08-01), Fujikawa et al.
patent: 5798438 (1998-08-01), Sawan et al.
patent: 58

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