Removal of perfluorocarbons from gas streams

Gas separation: processes – Solid sorption – Including reduction of pressure

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95 99, 95131, 95143, 95902, 95903, B01D 53047

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active

054177421

ABSTRACT:
Perfluorocarbons are recovered from gas streams by subjecting the gas stream to an adsorption process in a bed of one or more energetically homogeneous adsorbents such as silicon-rich adsorbents of the FAU structure, silicon-rich adsorbents of the BEA structure, silicon-rich adsorbents of the MOR structure. The adsorption process is preferably pressure swing adsorption or temperature swing adsorption.

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