Removal of particles from solid-state surfaces by laser bombardm

Details Removal of particles from solid-state surfaces by laser bombardm Removal of particles from solid-state surfaces by laser bombardm

1990-01-08

1990-12-25

Albritton, C. L.

Electric heating

Metal heating

By arc

21912182, 21912186, B23K 2600

Patent

active

049805363

ABSTRACT:
To remove small particles from surfaces of solid bodies at least one laser pulse of high power density (excimer laser) is directed onto the surface. The method is particularly suited to clean Si-masks used in electron-beam lithographic devices. An arrangement for in-situ-cleaning of masks in accordance to this method is integrated in such an electron-beam lithographic device.

REFERENCES:
patent: 4720621 (1988-01-01), Langen

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