Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1996-07-26
1998-09-01
Goodrow, John
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 12, B08B 312
Patent
active
058006257
ABSTRACT:
An apparatus and method for removing undesired material from the surface of a substrate provides a flow of inert gas over the undesired material substrate surface while irradiating the undesired material with energetic photons directed at an angle that is oblique to the substrate. The invention enables removal of undesired material without altering the physical properties of the material underlying or adjacent the removed, undesired material. In certain circumstances, the non-perpendicular incidence permits effective removal where normal incidence caused damage to the substrate or poor removal or both.
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Engelsberg Audrey C.
Johnson Andrew W.
Parker William P.
Cauldron Limited Partnership
Goodell Robert J.
Goodrow John
Talbot C. Scott
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