Etching a substrate: processes – Nongaseous phase etching of substrate – Relative movement between the substrate and a confined pool...
Patent
1995-01-19
1996-01-23
Kunemund, Robert
Etching a substrate: processes
Nongaseous phase etching of substrate
Relative movement between the substrate and a confined pool...
216106, 216 92, H01L 2100
Patent
active
054862345
ABSTRACT:
A process of removing both the field metal, such as copper, and a metal, such as copper, embedded into a dielectric or substrate at substantially the same rate by dripping or spraying a suitable metal etchant onto a spinning wafer to etch the metal evenly on the entire surface of the wafer. By this process the field metal is etched away completely while etching of the metal inside patterned features in the dielectric at the same or a lesser rate. This process is dependent on the type of chemical etchant used, the concentration and the temperature of the solution, and also the rate of spin speed of the wafer during the etching. The process substantially reduces the metal removal time compared to mechanical polishing, for example, and can be carried out using significantly less expensive equipment.
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Hoffman, IBM Technical Disclosure Bulletin, vol. 2, No. 6 Apr. 1960.
Contolini Robert J.
Mayer Steven T.
Tarte Lisa A.
Carnahan L. E.
Chang Joni Y.
Kunemund Robert
Moser William R.
Sartorio Henry P.
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