Removably holding planar articles for polishing operations

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

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51216LP, 51216T, 51237R, 156247, 156299, 1563086, 156344, B32B 3100

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active

042395674

ABSTRACT:
PLanar articles such as silicon wafers 40 are removably mounted onto a flat microcellular polyurethane surface layer 48 of a carrier 30 to permit an exposed surface 42 of each wafer 40 to be polished.
To retain the wafers 40 against lateral polishing forces on the carrier 30 the surface of the layer 48 is treated with a dilute organic acid prior to mounting the wafers 40. The treatment involves contacting the surface of the layer 48 with the acid selected from the group consisting of citric, propionic, formic and acetic acids. The surface of the layer 48 is thoroughly wetted with the acid after which all excess acid is scraped from the surface. The wafers 40 are then manually placed upon the surface while it is still wet.

REFERENCES:
patent: 2597721 (1952-05-01), Goebel et al.
patent: 2699633 (1955-01-01), Lapenas
patent: 3287197 (1966-11-01), Errede
patent: 3449870 (1969-06-01), Jenson
patent: 3453783 (1969-07-01), Queen
patent: 3561995 (1971-02-01), Wu et al.
patent: 3841031 (1974-10-01), Walsh
patent: 4132037 (1979-01-01), Bonora
Stevens, "Surfactants", Kirk-Othmer ect., vol. 19, pp. 507-593, .COPYRGT.1969.
Hackh's Chemical Dictionary, 4th Edition, p. 650.

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