Removably attachable fore-chamber for sequentially registering s

Details Removably attachable fore-chamber for sequentially registering s Removably attachable fore-chamber for sequentially registering s

1990-06-13

1992-08-04

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

118715, 118719, 118730, 118733, C23C 1600

Patent

active

051357780

ABSTRACT:
Apparatus and process for loading substrates into an evacuable fore-chamber and registering the substrates with an opening in a vacuum treatment chamber to which the fore-chamber is attached. The fore-chamber is removably attached to a an external surface of a wall of the vacuum treatment chamber such that an opening in a wall of the fore-chamber is registered with an opening in the wall of the vacuum treatment chamber. A rotatable plate lying along the wall of the fore-chamber has a plurality of substrate holders each dimensioned to register with the opening in the vacuum treatment chamber. Rotation of the plate enables sequential exposure of the substrates to the vacuum treatment chamber for treatment without breaking the vacuum in the vacuum treatment chamber.

REFERENCES:
patent: 3428197 (1969-02-01), Fischer et al.
patent: 4548699 (1985-10-01), Hutchinson et al.
patent: 4634331 (1987-01-01), Hertel
patent: 4938858 (1990-07-01), Zejda

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