Removable reticle window and support frame using magnetic force

Details Removable reticle window and support frame using magnetic force Removable reticle window and support frame using magnetic force

2006-05-09

2006-05-09

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C430S005000

Reexamination Certificate

active

07042554

ABSTRACT:
An apparatus for maintaining an optical gap between a pellicle and a reticle in a photolithography system includes a frame defining first and second opposing surfaces, a reticle mated to the first opposing surface using magnetic coupling and a pellicle mated to the second opposing surface using magnetic coupling.

REFERENCES:
patent: 4833051 (1989-05-01), Imamura
patent: 6239863 (2001-05-01), Catey et al.
patent: 6492067 (2002-12-01), Klebanoff et al.
patent: 6912043 (2005-06-01), Galburt
patent: 2002/0154285 (2002-10-01), Ramamoorthy et al.
patent: 2002/0155359 (2002-10-01), Muzio et al.
patent: 2003/0231092 (2003-12-01), Sabau
patent: 11-044947 (1999-02-01), None
patent: WO 01/40870 (2001-06-01), None
European Search Report from European Appl. No. 04 00 0177, 3 pages.
English Abstract for Japanese Patent Publication No. 63071853, 1 page.
English Abstract for Japanese Patent Publication No. 05019452, 1 page.
Singapore Search Report from Singapore Appl. No. 200400064-2, 6 pages.
English Abstract for Japanese Patent Publication No. 06-236022, publication date Aug. 23, 1994, 1 page.
English Abstract for Japanese Patent Publication No. 11-044947, publication date Feb. 16, 1999, 7 pages.
English Abstract for Japanese Patent Publication No. 11295880 A, publication date Oct. 29, 1999, 1 page.

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