Removable polishing pad for chemical mechanical polishing

Details Removable polishing pad for chemical mechanical polishing Removable polishing pad for chemical mechanical polishing

2007-11-09

2010-06-01

Rachuba, Maurina (Department: 3727)

Abrading

Abrading process

Glass or stone abrading

C451S285000

Reexamination Certificate

active

07727052

ABSTRACT:
The present invention offers a device for rendering CMP polishing pads easily and temporarily removable from and replaceable upon the platen of a CMP polishing apparatus comprising two sheets, the upper sheet attached to the said CMP polishing pad and the lower attached to the said platen, the said two sheets held together by pegs, pins or protrusions fitted to matching holes in the upper surface of the lower sheet and the lower surface of the upper sheet, said pegs or pins attached to either the upper or lower sheet and able to enter the hold on the adjoining sheet when the sheets are brought together and hold the sheets together by means of the sliding friction attendant upon a tight fit with the said holes. The device allows far easier metrology and storage of CMP polishing pads at different stages of use with no damage to the CMP pad, which may be put back into service at any time. The transparency of the upper sheet further allows users to prevent formation of bubbles in the adhesive holding the CMP pad to the upper sheet, thereby avoiding significant degradation of CMP performance.

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