Electrical resistors – With base extending along resistance element – Resistance element and/or terminals printed or marked on base
Patent
1992-09-04
1994-06-21
Lateef, Marvin M.
Electrical resistors
With base extending along resistance element
Resistance element and/or terminals printed or marked on base
338195, 338309, 338314, H01C 1012
Patent
active
053231384
ABSTRACT:
A thin film resistor with an insulating layer disposed between a substrate material and a resistor material is disclosed. Also, disclosed is a technique for fabricating this thin film resistor. In accordance with the preferred embodiment, the thin film resistor employs an insulating layer of silicon nitride with a thickness of 2000 .ANG.. The insulating layer prevents the resistor layer from diffusing into the substrate material which, in turn, significantly reduces variations in the resistor value during accelerated life testing. Compared to thin film resistors with a resistor layer evaporated directly upon a substrate material, reliability is increased from a few hundred hours up to thousands of hours. Also, the maximum current handling capability is increased by greater than one order of magnitude, which results in a thin film resistor which requires less surface area of a wafer.
REFERENCES:
patent: 4952904 (1990-08-01), Johnson et al.
patent: 5081439 (1992-01-01), Natzle et al.
patent: 5111179 (1992-05-01), Flassayer et al.
Oki Aaron K.
Streit Dwight C.
Umemoto Donald K.
Yamada Frank M.
Lateef Marvin M.
Taylor Ronald L.
TRW Inc.
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