Reliable piezo-resistive pressure sensor

Details Reliable piezo-resistive pressure sensor Reliable piezo-resistive pressure sensor

2008-07-08

2008-07-08

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C438S053000

Reexamination Certificate

active

11405961

ABSTRACT:
A pressure sensor system for measuring the pressure of a corrosive media includes a silicon plate forming a diaphragm and a glass plate or ring bonded to said silicon plate with an opening over the diaphragm. The diaphragm has resistive areas of different orientations to provide first resistive areas which have increased resistance with diaphragm deflection, and other areas which have decreased or little change in resistance with diaphragm deflection. The resistive areas may be formed by doping the silicon plate. The resistive areas have broad doped connectors extending outward to areas beyond the seal between the glass plate or ring, to wire bond areas on the silicon plate. Accordingly, the wire bond pads are not exposed to the corrosive media.

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patent: 6472244 (2002-10-01), Ferrari et al.
patent: 6874367 (2005-04-01), Jakobsen
patent: 7028552 (2006-04-01), Obermeier

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