Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-12-13
2005-12-13
Arbes, Carl J. (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S876000, C029S882000, C029S884000, C438S461000, C438S611000
Reexamination Certificate
active
06973722
ABSTRACT:
Spring structures are subjected to pre-release and post-release annealing to tune their tip height to match a specified target. Post-release annealing increases tip height, and pre-release annealing decreases tip height. The amount of tuning is related to the annealing temperature and/or time. Annealing schedules are determined for a pre-fabricated cache of unreleased spring structures such that finished spring structures having a variety of target heights can be economically produced by releasing/annealing the cache according to associated annealing schedules. Selective annealing is performed using lasers and heat absorbing/reflecting materials. Localized annealing is used to generate various spring structure shapes. Both stress-engineered and strain-engineered spring structures are tuned by annealing.
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Apte Raj B.
Chua Christopher L.
De Bruyker Dirk
Fork David K.
Hantschel Thomas
Arbes Carl J.
Bever Patrick T.
Bever Hoffman & Harms LLP
Palo Alto Research Center Incorporated
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