Relay lens used in an illumination system of a lithography...

Details Relay lens used in an illumination system of a lithography... Relay lens used in an illumination system of a lithography...

2007-10-30

2007-10-30

Pritchett, Joshua L (Department: 2872)

Optical: systems and elements

Lens

With light limiting or controlling means

C359S434000, C359S649000, C359S726000

Reexamination Certificate

active

10607193

ABSTRACT:
A relay lens is provided in an illumination system for use in microlithography. The relay lens can be used to uniformly illuminate a field at a reticle by telecentric light beams with variable aperture size. The relay lens can include first, second, and third lens groups. At least one of the second and third lens groups can include a single lens. This can reduce costs and increase transmission by requiring less CaF2because fewer optical elements are used compared to prior systems.

REFERENCES:
patent: 5134522 (1992-07-01), Ueda
patent: 5402267 (1995-03-01), Fürter et al.
patent: 6304389 (2001-10-01), Shibayama
patent: 6366410 (2002-04-01), Schultz et al.
patent: RE38438 (2004-02-01), Takahashi
patent: 2002/0036832 (2002-03-01), Schultz et al.
patent: 2003/0053218 (2003-03-01), Fujimoto et al.
patent: 0869 383 (1998-10-01), None
patent: 1001 314 (2000-05-01), None
patent: 1115 019 (2001-07-01), None
patent: 1 235 112 (2002-02-01), None
patent: WO 98/28644 (1998-07-01), None
patent: WO 02/14924 (2002-02-01), None
European Search Report for Appl. 3015468.6-2217—mailed Jan. 22, 2004.
Office Action from European Patent Office Dated Jul. 2, 2004 for European Patent Application No. 03 015 468.6-2217.
Austrian Search Report for Singapore Appln. 200304198-5 mailed Mar. 26, 2004.

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