Relative pressure sensor having an atmosphere-side damper

Details Relative pressure sensor having an atmosphere-side damper Relative pressure sensor having an atmosphere-side damper

2007-07-17

2007-07-17

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S707000, C073S716000

Reexamination Certificate

active

10533253

ABSTRACT:
A relative pressure sensor comprises two chambers and two separating membranes respectively provided for a process pressure and an ambient pressure. The chambers are separated by a pressure-sensitive element and are filled with a transmission medium. In order to attenuate process-side overload pulses, which act upon the first separating membrane, a hydraulic damper is provided that is placed on the side of the atmosphere between the second separating membrane and the pressure-sensitive element. The pressure-sensitive element is a piezoresistive silicon chip, the transmission medium consists of silicone oil, and the damper is comprised of a filter element made of sintered bronze having 29% porosity and an 11 micrometer pore diameter. The filter element has a length of 8 mm and a diameter of 2 mm.

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patent: 6279401 (2001-08-01), Karas
patent: 6813953 (2004-11-01), Baba et al.

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