Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1996-01-23
1997-07-08
Gonzalez, Frank
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356345, 250237G, G01B 902
Patent
active
056467303
ABSTRACT:
The apparatus disclosed herein employs a grating (13) which concentrates light at a preselected wavelength into the positive (33) and negative (35) first orders while minimizing the zeroth order (31). The grating (13) is illuminated with monochromatic light of the selected wavelength and a poly-phase periodic detector (25) has its sensing plane spaced from the grating a distance less than ##EQU1## where W is the width of the illuminated region of the grating. The period of the poly-phase detector is equal to P/2 so that each detector element (51) or phase responds principally to the natural interference between the positive and negative first orders without requiring magnification or redirection of the diffracted light. Preferably, the distance of the sensing plane from the grating (13) is greater than ##EQU2## so that the detector response does not include substantial components from diffraction orders higher than the first. Various embodiments of the invention are described including a wavefront compensation approach which greatly increases design freedom in the selection of grating and detector characteristics in implementing the present invention in practical and manufacturable devices.
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Mitchell Donald K.
Thorburn William G.
Gonzalez Frank
Kim Robert
MicroE, Inc.
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