Relative-displacement measurement method

Details Relative-displacement measurement method Relative-displacement measurement method

1987-01-27

1989-03-28

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356356, G01B 902

Patent

active

048158500

ABSTRACT:
A relative displacement among a plurality of objects is measured with a high degree of accuracy by utilizing diffraction and interference phenomena of waves through diffraction gratings formed on the objects. Forming diffraction gratings on a plurality of objects, aligned or registered with each other, a wave is made incident to the diffraction gratings, thereby diffracted waves are obtained. A phase difference of the diffracted waves is measured. As a result, relative-displacements among the plurality of objects are obtained with a high degree of accuracy.

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Experimental Evaluation of Interferometric . . . Registration.
A Dual Grating Alignment Technique for X-ray Lithography.
A New Interferometric Alignment Technique with Holographic Configuration.
Diffraction Gratings as Keys for Automatic Alignment in Proximity and Projection Printing.
Y. Ohtsuka, M. Tsubokawa, "Dynamic Two-Frequency Interferometry for Small Displacement Measurements" 2/84, pp. 25-29 of Optics and Laser Technology.
Flanders et al., "A New Interferometric Alignment Technique" Appl. Phys. Lett., vol. 31, No. 7, pp. 426-427, 10/77.

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