Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Patent
1994-05-23
1995-12-19
Gehman, Bryon P.
Special receptacle or package
Holder for a removable electrical component
For a semiconductor wafer
141 98, 206454, 206725, 211 41, 414940, B65D 8530
Patent
active
054761760
ABSTRACT:
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The device includes a cover with a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. It also includes a purging means attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder. The holder has contoured recess-forming pairs that do not effect semiconductor wafer transfer when the recess forming pairs are warped. The recess-forming pairs also have integrally corresponding ribs that help prevent warpage of the contoured recess-forming pairs during the plastic injection molding process.
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Slocum, Alexander H., "Sematech Short Course: Deterministic Machine Design Increasing Reliability and Performance", Precision Machine Design, Prentice Hall, Englewood Cliffs, 1992, pp. 49-64.
Gregerson Barry
Wittman Boyd
Empak Inc.
Gehman Bryon P.
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