Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2008-11-24
2010-12-28
Allen, Andre J (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
C073S715000
Reexamination Certificate
active
07856885
ABSTRACT:
A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a multiple diaphragm piezoresistive pressure sensor for measuring the pressure of a liquid, comprising an inner deformable diaphragm formed on a silicon substrate, the inner deformable diaphragm having a first thickness an outer deformable diaphragm formed on the silicon substrate, the outer deformable diaphragm having a second thickness which is greater than the first thickness, positioned below the inner deformable diaphragm to support the inner deformable diaphragm, a first piezoresistive bridge embedded in the inner deformable diaphragm, a second piezoresistive bridge embedded in the outer deformable diaphragm and possibly a third piezoresistive bridge embedded in the silicon substrate to compensate for temperature variations.
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Mohan, A.; Malshe, A.P.; Aravamudhan, S.; Bhansali, S. “Piezoresistive MEMS pressure sensor and packaging for harsh oceanic environment.” Electronic Components and Technology Conference. 2004. Jun. 1-4, 2004. vol. 1. pp. 948-950.
Bhansali Shekhar
Bhat Shreyas
Langebrake Lawrence C.
Allen Andre J
Sauter Molly L.
Smith & Hopen , P.A.
University of South Florida
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