Registration method and apparatus therefor

Details Registration method and apparatus therefor Registration method and apparatus therefor

1993-12-27

1995-08-15

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

G01B 1100

Patent

active

054424453

ABSTRACT:
A registration system for registering a target registration object with respect to a predetermined reference position by using a registration mark formed on the target registration object includes the intensity measurement step of receiving a mark image for a predetermined period of time by a storage type sensor while an area of the target registration object which includes the mark is illuminated, the storage type sensor having elements whose positional relationship is known with respect to the mark image, the process of obtaining a center position of the mark image on the storage type sensor in a positioning direction in accordance with outputs from the elements of the storage type sensor obtained in the intensity measurement step, the distance calculation step of calculating a distance between the reference position and the center position obtained by the process, and the moving step of moving the target registration object by a distance corresponding to the distance obtained in the distance calculation step.

REFERENCES:
patent: 4275306 (1981-06-01), Kato et al.
patent: 4629313 (1986-12-01), Tanimoto
patent: 4636626 (1987-01-01), Hazama et al.
patent: 4886974 (1989-12-01), Ina
patent: 4962318 (1990-10-01), Nishi
Taniguchi et al, "Alignment Pattern Detection Method Using Diagonal Imaging Optics for X-ray Exposure System" vol. 55 #9, pp. 139-145.
IBM Technical Disclosure Bulletin, vol. 17, No. 10, Mar. 1975, pp. 2890-2892, H. A. Khoury, "2-D Area Array Solid-State Feedback Automatic Wafer Alignment System".

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