Registration detection system

Details Registration detection system Registration detection system

2011-01-18

2011-01-18

Werner, Brian P (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

07873206

ABSTRACT:
A registration detection system performing registration-detecting each substrate in a lot without lowering an original throughput of a lithography system and maintaining high accuracy usable for the correction of an exposure process. Therefore, registration detection5system includes: the first detection apparatus installed on a pathway to a collection in a transport container of substrates taken out of transport container, after passing at least exposure process and a development process, registration-detects substrates after passing development process, according to stipulated criteria, and outputs results of registration detection for use in correction of exposure process; the second detection apparatus outside10the pathway, and registration-detecting substrate when substrate after passing the first detection apparatus and collected in the transport container is taken out of transport container again; and a correction unit comparing detection results by the first and the second detection apparatuses to correct registration detection criteria in the first detection apparatus.

REFERENCES:
patent: 6553137 (2003-04-01), Tomimatu
patent: 7433039 (2008-10-01), Levinski et al.
patent: 2005/0205776 (2005-09-01), Dana et al.
patent: 11-31299 (1999-02-01), None
patent: 11-186358 (1999-07-01), None
patent: 03/077291 (2003-09-01), None
patent: 2005/083756 (2005-09-01), None

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