Registration blocks for a photomask assembly

Details Registration blocks for a photomask assembly Registration blocks for a photomask assembly

1982-03-29

1984-05-01

Wintercorn, Richard A.

Photocopying

Contact printing

Frames

355133, G03B 2704

Patent

active

044457758

ABSTRACT:
An alignment system for providing simple, efficient, repeatable and precise registration of a pair of plates in a photomask assembly for use in photolithographic imaging processes is disclosed, wherein registration blocks are attached to the edges of one plate and block stops are attached to the other plate in appropriate positions to engage said registration blocks when the plates are brought into parallel facing relationship in contact with a substrate to be processed.

REFERENCES:
patent: 2399975 (1946-05-01), Ball
patent: 3067666 (1962-12-01), Coffman
patent: 3634009 (1972-01-01), Van Dusen
patent: 3927943 (1975-12-01), Pohl et al.
patent: 3957371 (1976-05-01), Rich
patent: 4032233 (1977-06-01), Oscarsson et al.
patent: 4159176 (1979-06-01), de Masi

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