Refrigerant fluid trap for vacuum evaporators for the deposit of

Details Refrigerant fluid trap for vacuum evaporators for the deposit of Refrigerant fluid trap for vacuum evaporators for the deposit of

1987-07-10

1988-11-22

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 21912133, 417901, B01D 800

Patent

active

047856386

ABSTRACT:
A refrigerant fluid trap for a vacuum evaporator for depositing a thin metal film including a U-shaped structure for passage of refrigerant fluid, forming an interior space for trapping condensable vapors. In said interior space there is housed a titanium evaporation source.

REFERENCES:
patent: 3144200 (1964-08-01), Taylor et al.
patent: 3220167 (1965-11-01), Van Der Ster et al.
patent: 3252291 (1966-05-01), Eder
patent: 3472039 (1969-10-01), Hait
patent: 3769806 (1973-11-01), Boissin et al.
patent: 4488506 (1984-12-01), Heinecke et al.
patent: 4599869 (1986-07-01), Ozin et al.

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