Refractory silicide conductor containing iron

Details Refractory silicide conductor containing iron Refractory silicide conductor containing iron

1985-05-06

1988-01-26

James, Andrew J.

Alloys or metallic compositions

Aluminum base

Copper containing

357 71, 420578, 420429, H01L 2946, H01L 2940

Patent

active

047219912

ABSTRACT:
A semiconductor device having an electroconductive portion made of a multi-component alloy which may be represented by a formula:

REFERENCES:
patent: 3582324 (1971-06-01), Kunert et al.
patent: 3854940 (1974-12-01), Hoekje
patent: 4619695 (1986-10-01), Oikawa et al.
Metals Handbook, 9th Ed., vol. 2, 1979, American Society for Metals, Metals Park, Ohio.
54 J. Appln. Phys. (2), 937-43 (Feb. 1983), Ting et al.
IEEE Translations on Electron Devices, vol. ED-30, No. 11, 1480-1504 (Nov. 1983), Chow et al.
M. A. Nicolet et al., "Formation and Characterization of Transition-Metal Silicides," VLSI Electronics: Microstructure Science, vol. 6, 1983.
Silicides for VLSI Application, Title page and p. 30, Academic Press, 1983, Murarka, S. P.

Affiliated with

Also associated with

Rating

Refractory silicide conductor containing iron does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Refractory silicide conductor containing iron, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Refractory silicide conductor containing iron will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1470785