Electrical resistors – With base extending along resistance element – Resistance element and/or terminals printed or marked on base
Patent
1988-08-19
1990-02-27
Reynolds, B. A.
Electrical resistors
With base extending along resistance element
Resistance element and/or terminals printed or marked on base
338308, 357 5, 427 96, 427103, 156625, H01C 1012
Patent
active
049049801
ABSTRACT:
This is a structure of, and method for preparation of, molybdenum resistors in a superconductor integrated circuit. It utilizes a pattern superconductor film; applying an aluminum film on the patterned superconductor film; and then applying a molybdenum film on the aluminum film to provide an aluminum-molybdenum, etch-stop interface; applying a patterned resist film on the molybdenum film; etching the exposed molybdenum film to expose a portion of the aluminum-molybdenum, etch-stop interface; and oxidizing the exposed aluminum-molybdenum, etch-stop interface. The aluminum-molybdenum etch stop interface protects the patterned superconductor film and the support (including any other underlayers) and increases processing margins for the etch time. Preferably the etching of the exposed molybdenum film is by reactive ion etching and the oxidizing the exposed aluminum-molybdenum etch stop interface is by exposing the interface to a plasma containing about 25-75 volume percent oxygen and 25-75 volume percent argon) and the aluminum film is about 30-40 Angstroms thick).
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Buttyan Joseph
Przybysz John X.
Lateef M.vin
Reynolds B. A.
Stoltz R. A.
Westinghouse Electric Corp.
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