Refractive index monitor for deposition of gradient-index films

Details Refractive index monitor for deposition of gradient-index films Refractive index monitor for deposition of gradient-index films

1989-09-22

1992-03-31

McGraw, Vincent P.

Optics: measuring and testing

Refraction testing

356382, G01N 2141, G01B 1106

Patent

active

051002337

ABSTRACT:
A method is provided for monitoring the refractive index of an optical film as it is being deposited on a substrate. The film is illuminated by a source of light at a wavelength that is outside and less than the reflectance band of the coating. If the refractive index of the film is initially matched to the refractive index of the substrate and has no abrupt changes in its gradient-index profile, reflectance from the surface of the film can be detected and measured. In the absence of interference fringing from internal reflections, surface reflectance of the interface of the film with the surrounding air or vacuum is closely related to the refractive index of the film at its surface. Thus, surface reflection is monitored to provide a control signal to the deposition apparatus to conform the refractive index of material being deposited to a predetermined refractive index profile specified for the desired optical film.

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Macleod, H. A., Thin-Film Optical Filters, 2d Ed., pp. 423-445 (MacMillan, 1986).

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