Refractive/diffractive optical system for broad-band through-the

Details Refractive/diffractive optical system for broad-band through-the Refractive/diffractive optical system for broad-band through-the

1993-01-04

1994-12-06

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 41, 355 68, 355 71, G03B 2742

Patent

active

053715705

ABSTRACT:
A chromatic aberration-corrected optical system for broad-band through-the-lens (TTL) imaging and position detection of alignment marks deposed on a substrate located at the exposure plane of an exposure apparatus, for example, a stepper machine, uses a first projection lens capable of focusing a first broad-band alignment illumination and a second exposure illumination onto the substrate. A second achromat lens and a third refractive/diffractive hybrid lens are configured and designed to provide, in conjunction with the first projection lens, longitudinal and lateral chromatic aberration correction over a wavelength range from about 550-650 nm of the broad-band alignment illumination.

REFERENCES:
patent: 4770477 (1988-09-01), Shafer
patent: 4798962 (1989-01-01), Matsumoto et al.
patent: 4962318 (1990-10-01), Nishi
patent: 5094539 (1992-03-01), Komoriya et al.
patent: 5140366 (1992-08-01), Shiozawa et al.
Broadband Imaging with Holographic Lenses-Optical Engineering Jun. 1989 vol. 28 No. 6 pp. 592-598.

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