Coherent light generators – Particular resonant cavity – Specified cavity component
Patent
1988-02-25
1989-08-08
Sikes, William L.
Coherent light generators
Particular resonant cavity
Specified cavity component
372 57, 350164, H01S 308
Patent
active
048560197
ABSTRACT:
A reflector for an excimer laser is composed of an aluminum layer deposited on a substrate and at least two pairs of dielectric multilayers of high refractive index material and low refractive index material alternately piled on the aluminum layer, and optical thickness of the respective layers of an outer pair of the dielectric multilayers are deviated from .lambda./4 and total optical thickness of the outer pair is made to be .lambda./2.
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Gill, D. H. et al.: "Use of Non-Quarter-Wave Designs to Increase the Damage Resistance of Reflectors at 532 and 1064 Nanometers", pp. 260-270, Laser Induced Damage in Optical Materials: 1977, issued Dec. 1977.
Iwabuchi Takashi
Miyata Takeo
Matsushita Electric - Industrial Co., Ltd.
Sikes William L.
Thi Vo Xuan
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