Reflectometer and method for manufacturing a reflectometer

Details Reflectometer and method for manufacturing a reflectometer Reflectometer and method for manufacturing a reflectometer

2005-11-01

2005-11-01

Juba, Jr., John (Department: 2872)

Optical: systems and elements

Scale or indicia reading

C359S572000, C250S23700G, C033S0010LE, C033S488000, C216S024000

Reexamination Certificate

active

06961174

ABSTRACT:
A reflection-type graduation having a silicon substrate. The silicon substrate has first subsections formed thereon. Each of the first subsections has etched oblique surfaces. The surfaces are positioned so that light beams directed incident to the surfaces cause no retroreflection. The substrate also includes second subsections having relatively higher reflecting properties as compared to the first subsections. The first subsections and second subsections are alternatively disposed on the substrate in a first direction.

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