Reflective/refractive optical bar code scanning through a transp

Details Reflective/refractive optical bar code scanning through a transp Reflective/refractive optical bar code scanning through a transp

1997-03-27

1998-10-06

Wong, Don

Registers

Systems controlled by data bearing records

235462, 235475, G06K 1300

Patent

active

058180184

ABSTRACT:
A scanning system for scanning bar codes attached to wafer cassettes received in a chamber of a wafer processing tool. The system includes a scanner positioned external to the chamber for reading the bar codes and generating signals indicative thereof. Light generated by the scanner passes through an opening in the chamber wall and reflects off one or more reflective or refractive members positioned internal to the chamber, to illuminate the bar code attached to a wafer cassette contained in the chamber. Light reflected from the bar code likewise is bent by the reflective or refractive members and passes through the wall opening where it is sensed by the scanner. The reflective or refractive members are positioned so that the scanner can read bar codes which are not within the line of sight of the scanner through the wall opening. Once the bar code is read, the scanner generates a signal which can be used to access a database stored in memory which contains information related to wafers contained in the cassettes identified by the bar codes.

REFERENCES:
patent: 4757355 (1988-07-01), Iizuka et al.
patent: 5015832 (1991-05-01), Filipski et al.
patent: 5298727 (1994-03-01), Spratte et al.
patent: 5389769 (1995-02-01), Yamashita et al.
patent: 5406060 (1995-04-01), Gitin

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