Reflective projection system comprising four spherical mirrors

Details Reflective projection system comprising four spherical mirrors Reflective projection system comprising four spherical mirrors

1993-09-09

1995-04-25

Healy, Brian

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

359838, 359839, 359857, 359859, G02B 508

Patent

active

054104343

ABSTRACT:
The reflective projection system has a relatively wide field of view that comprises two concave and two convex spherical mirrors, situated in certain non-light-blocking positions with respect to one another, for deriving, with negligible image aberrations, a projected magnified or demagnified image over at least one of a range of magnification or demagnification power values between 3 and infinity that may be zoomed over this range. Such a reflective projection system, utilizing a high-power excimer laser radiation source, may be employed for ablating the surface of a substrate, such as the surface of the coating of a coated wafer, with a demagnified image of an object pattern defined by a mask, the radiation intensity of the demagnified image being sufficiently high to effect this ablation.

REFERENCES:
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patent: 5227923 (1993-07-01), Kebo
patent: 5253117 (1993-10-01), Kashima
patent: 5257139 (1993-10-01), Higuchi
patent: 5287218 (1994-02-01), Chen
patent: 5291340 (1994-03-01), Kashima

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