Reflective optical imaging system for extreme ultraviolet wavele

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component

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359859, G02B 510

Patent

active

052125882

ABSTRACT:
A projection reflection optical system has two mirrors in a coaxial, four reflection configuration to reproduce the image of an object. The mirrors have spherical reflection surfaces to provide a very high resolution of object feature wavelengths less than 200 .mu.m, and preferably less than 100 .mu.m. An image resolution of features less than 0.05-0.1 .mu.m, is obtained over a large area field; i.e., 25.4 mm .times.25.4 mm, with a distortion less than 0.1 of the resolution over the image field.

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