Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Patent
1991-04-09
1993-05-18
Arnold, Bruce Y.
Optical: systems and elements
Having significant infrared or ultraviolet property
Lens, lens system or component
359859, G02B 510
Patent
active
052125882
ABSTRACT:
A projection reflection optical system has two mirrors in a coaxial, four reflection configuration to reproduce the image of an object. The mirrors have spherical reflection surfaces to provide a very high resolution of object feature wavelengths less than 200 .mu.m, and preferably less than 100 .mu.m. An image resolution of features less than 0.05-0.1 .mu.m, is obtained over a large area field; i.e., 25.4 mm .times.25.4 mm, with a distortion less than 0.1 of the resolution over the image field.
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Communication from Dave Shafer to Brian Newnam dated May 18, 1990.
Newnam Brian E.
Viswanathan Vriddhachalam K.
Arnold Bruce Y.
Gaetjens Paul D.
Moser William R.
Shafer R. D.
The United States of America as represented by the United States
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