Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1997-06-27
1998-10-27
Angebranndt, Martin
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430322, 430326, G03F 100
Patent
active
058276220
ABSTRACT:
The invention relates to a reflective phase-shifting lithographic mask having a reflective surface comprising a plurality of areas having different refractive indices.
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Coufal Hans Juergen
Grygier Robert Keith
Angebranndt Martin
International Business Machines - Corporation
Martin Robert B.
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