Reflective liquid crystal display lithography system

Details Reflective liquid crystal display lithography system Reflective liquid crystal display lithography system

2005-08-30

2005-08-30

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Methods

C355S053000, C355S067000

Reexamination Certificate

active

06937320

ABSTRACT:
A lithography system for forming geometric patterns on a workpiece is described herein. The lithography system may include a reflective liquid crystal display comprising an array of configurable pixels, a radiation source for directing radiation onto the reflective liquid crystal display, a projection system for reducing a radiation pattern reflected by the reflective liquid crystal display and projecting the reduced radiation pattern onto a workpiece, and a stage for holding the workpiece. The lithography system may be used to form geometric patterns on a substrate during semiconductor fabrication.

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E.C. Colgan et al., “On-chip Metallization Layer for Reflective Light Valves”, IBM Journal of Research & Development, vol. 42, 1998, IBM Centre for Advanced Studies, Website: www.research.ibm.com/journal/rd/423/colgan.html.

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