Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate
2007-02-27
2008-12-30
Amari, Alessandro (Department: 2872)
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
C355S053000, C378S034000
Reexamination Certificate
active
07470033
ABSTRACT:
Projection-optical systems are disclosed that have a large image-side NA of, e.g., ≧0.45, and that allow inspection for surface-shape errors of reflecting surfaces with prescribed precision. A first reflective image-forming optical system forms an intermediate image of a first surface. A second reflective image-forming optical system forms a reduced image, on a second surface, of the intermediate image. The first reflective image-forming optical system has a first concave mirror, a second convex mirror, a third mirror, and a fourth concave mirror. The second reflective image-forming optical system has a fifth concave mirror, a sixth mirror, a seventh convex mirror, and an eighth concave mirror. If the absolute value of the center radius of curvature of the reflective surface of the second mirror is RM2, and the maximum object height on the first surface is H0, then the condition 1<RM2/H0<6 is satisfied.
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Amari Alessandro
Klarquist & Sparkman, LLP
Nikon Corporation
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