Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate
2005-03-01
2005-03-01
Epps, Georgia (Department: 2873)
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
C359S859000
Reexamination Certificate
active
06860610
ABSTRACT:
A reflection type projection optical system for projecting a pattern on an object surface onto an image surface and forming an imaging system that forms an intermediate image between the object surface and image surface includes four or more mirrors arranged substantially as a coaxial system to reflect light from an object side to an image side, reflection surfaces on the four or more mirrors forming the same direction for forming a reflection angle.
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Optical Engineering, Journal of the Society of Photo-Optical Instrumentation Engineers: “Cassegrainian-inverse Cassegrainian four-aspherical mirror system (magnification=+1) derived from the solution of all zero third-order aberrations and suitable for deep-ultraviolet optical lithography”; Jul. 1994, vol. 33, No. 7, pp. 2480-2486.
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“Improved four-mirror optical system for deep-ultraviolet submicrometer lithography”, Optical Engineer, 33(1994), No. 3, Bellingham, WA, US, pp. 536-541.
“Cassegrainian-inverse Cassegrainian four-aspherical mirror system (magnification = +1) derived from the solution of all zero third-order aberrations and suitable for deep-ultraviolet optical lithography”, Optical Engineering 33(1994)Jul., No. 7, Bellingham, WA, US.
Canon Kabushiki Kaisha
Epps Georgia
Harrington Alicia M.
Morgan & Finnegan , LLP
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