Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-05-16
2006-05-16
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000, C359S291000, C359S224200, C359S318000, C359S298000
Reexamination Certificate
active
07046422
ABSTRACT:
A reflection-type light modulating array element has: a substrate; a movable member provided with a beam body provided on the substrate through a first gap, a light reflector capable of rotational displacement by twisting of the beam body, and an electrically conducting part formed at least in a partial portion of the movable member; a lower electrode provided on a substrate side to face the movable member through the first gap, and an upper electrode provided on a side opposite to the lower electrode to face the movable member through a second gap, and thereby the movable member is between the lower electrode and the upper electrode, wherein a voltage is applied to the upper electrode, the lower electrode and the electrically conducting part to cause an rocking displacement of the light reflector and thereby deflect a reflection direction of a light.
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“Dual-Mode micromirrors for Optical Phased Array Applications”, by U.Krishnamoorthy, et al., Transducers 01 Eurosensors XV, The 11thInternational Conference on Solid-State Sensors and Actuators, Munich, Germany, Jun. 10-14, 2001.
Kimura Koichi
Sumi Katsuto
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