Reflection type ellipsometer for measuring thin film phase diffe

Details Reflection type ellipsometer for measuring thin film phase diffe Reflection type ellipsometer for measuring thin film phase diffe

1976-04-23

1978-08-08

Corbin, John K.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

G01J 400

Patent

active

041053389

ABSTRACT:
A reflection type ellipsometer for measuring the phase difference of a sample, which comprises a light source, a polarizer, a sample, an analyzer and a photoelectric converter element arranged in the conventional manner. In accordance with the present invention the ellipsometer includes an adjustable phase difference compensating plate which is disposed on the light path between the polarizer and the analyzer and at an azimuth of 0.degree. with respect to the sample surface, the phase difference (.DELTA. C) introduced by the compensating plate being preset to a value which eliminates a predetermined or reference phase difference (.DELTA. o). The ellipsometer of the present invention further includes a double-refractive element which introduces a double refraction phase difference proportional to a voltage applied thereto. The double-refractive element is also disposed on the light path between the polarizer and the analyzer. Control means is provided for comparing the output voltage from a photoelectric converter element with a predetermined or reference voltage and for applying to the double-refractive element a voltage which causes the double-refractive element to introduce a phase difference (.DELTA.k) which eliminates the phase difference (.DELTA.s) corresponding to the deviation of the phase difference (.DELTA.o+ .DELTA. s) of the sample from the predetermined phase difference (.DELTA. o).

REFERENCES:
patent: 1978434 (1934-10-01), Maris
patent: 3602597 (1971-08-01), Sproul

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