Reflection scale and displacement measurement apparatus...

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis

Reexamination Certificate

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C250S231130, C250S231180

Reexamination Certificate

active

06975408

ABSTRACT:
This invention realizes a detection system which serves as a displacement measurement apparatus for optically detecting a relative position, improves the use efficiency of a light amount, and is resistant to mechanical variations. More specifically, in an optical sensor having a light source, a reflector for reflecting a divergent light beam from the light source, and a light-receiving portion for receiving a reflected light beam from the reflector. The reflector has an optical characteristic that a divergent light beam from the light source is wavefront-split into a plurality of beams and the respective split light beams are overlaid at a predetermined position.

REFERENCES:
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patent: 5057686 (1991-10-01), Hikawa et al.
patent: 5204524 (1993-04-01), Ichikawa et al.
patent: 5534693 (1996-07-01), Kondo et al.
patent: 5909283 (1999-06-01), Eselun
patent: 6654128 (2003-11-01), Takayama et al.
patent: 6713756 (2004-03-01), Yamamoto et al.
patent: 2002/0000515 (2002-01-01), Takayama et al.

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