Reflection characteristic measuring apparatus

Details Reflection characteristic measuring apparatus Reflection characteristic measuring apparatus

2007-02-19

2008-10-14

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Of light reflection

C356S446000, C356S402000

Reexamination Certificate

active

07436516

ABSTRACT:
A reflection characteristic measuring apparatus includes: a light irradiating member for irradiating light toward a sample surface to be measured; a light detector, having a two-dimensional light receiving surface, for receiving reflection light from the sample surface illuminated with the light irradiated by the light irradiating member to output two-dimensional light receiving data concerning a first area corresponding to an area of the light receiving surface; an area setter for setting a second area at an appropriate position within the first area, the second area being smaller than the first area, to restrict light receiving data to be used in obtaining a reflection characteristic of the sample surface; and a calculator for obtaining a characteristic of the sample surface, based on two-dimensional light receiving data concerning the second area. The area setter detects whether the two-dimensional light receiving data concerning the first area includes a peak value concerning light receiving; sets the second area, with a position of the peak value being defined as a reference position, if the peak value is detected; and sets the second area, with a central position on the first area being defined as the reference position, if the peak value is not detected.

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