Reflection and refraction optical system and projection exposure

Details Reflection and refraction optical system and projection exposure Reflection and refraction optical system and projection exposure

1995-06-05

1998-02-03

Shafer, Ricky D.

Optical: systems and elements

Polarization without modulation

Polarizarion by dichroism

359495, 359497, 359900, 355 45, 355 60, 355 66, 355 77, G02B 530, G02B 2728, G03B 2770

Patent

active

057150842

ABSTRACT:
A reflection and refraction optical system includes a polarization beam splitter, a concave mirror, a lens group and a quarter waveplate, wherein an additional waveplate is provided to transform S-polarized light from the polarization beam splitter into circularly polarized light.

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Matsumoto, Koichi, et al., "Issues and Method of Designing Lenses for Optical Lithography," Optical Engineering, 31(12); pp. 2657-2664 (Dec. 1992).

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