Reflecting mirror and exposure apparatus using the same

Details Reflecting mirror and exposure apparatus using the same Reflecting mirror and exposure apparatus using the same

2006-04-21

2008-11-18

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S292000, C359S298000

Reexamination Certificate

active

07453623

ABSTRACT:
A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.

REFERENCES:
patent: 3860884 (1975-01-01), Chang et al.
patent: 4162825 (1979-07-01), Dowty
patent: 4836092 (1989-06-01), Heubner et al.
patent: 5444566 (1995-08-01), Gale et al.
patent: 6043863 (2000-03-01), Ikeda
patent: 6393373 (2002-05-01), Duyar et al.
patent: 6842277 (2005-01-01), Watson
patent: 2003/0133087 (2003-07-01), Shima
patent: 2004-64076 (2004-02-01), None
patent: WO-02/12948 (2002-02-01), None

Affiliated with

Also associated with

Rating

Reflecting mirror and exposure apparatus using the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reflecting mirror and exposure apparatus using the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reflecting mirror and exposure apparatus using the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4021921