Reflecting device, communicating pipe, exhausting pump,...

Details Reflecting device, communicating pipe, exhausting pump,... Reflecting device, communicating pipe, exhausting pump,...

2011-04-19

2011-04-19

Allen, Stephone B (Department: 2872)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

C415S121100

Reexamination Certificate

active

07927066

ABSTRACT:
A reflecting device that enables to prevent infiltration of particles into a processing chamber. The reflecting device is disposed in a communicating pipe. The communicating pipe allows the processing chamber of a substrate processing apparatus and an exhaust pump to communicate with each other. The exhaust pump has at least one rotary blade. The reflecting device comprises at least one reflecting surface. The at least one reflecting surface is oriented to the exhausting pump.

REFERENCES:
patent: 4622819 (1986-11-01), Draper et al.
patent: 6193461 (2001-02-01), Hablanian
patent: 6331351 (2001-12-01), Waters et al.
patent: 2002/0126269 (2002-09-01), Sato
patent: 2003/0147075 (2003-08-01), Otsuki et al.
patent: 2003/0198741 (2003-10-01), Uchida et al.
Shintaro Sato, et al., “Visualization of Backflow Particles from Turbo Molecular Pump”, Clean Technology, May 31, 2003, pp. 20-23 (with English translation).

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