Reflecting device and pattern transfer apparatus using the same

Details Reflecting device and pattern transfer apparatus using the same Reflecting device and pattern transfer apparatus using the same

1990-03-06

1992-09-22

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 52, 355 66, G03B 2742

Patent

active

051501511

ABSTRACT:
A reflecting device includes a reflection surface for reflecting light inputted thereto from a predetermined direction; and a driving mechanism for moving the reflection surface without causing a change in a direction of reflection and a position of reflection of the inputted light.

REFERENCES:
patent: 2056600 (1936-10-01), Crosier
patent: 3194142 (1965-07-01), Black
patent: 3254933 (1966-06-01), Latulippe
patent: 3280696 (1966-10-01), Ketchian
patent: 4030806 (1977-06-01), Goshima et al.
patent: 4187475 (1980-02-01), Wieder
patent: 4577959 (1986-03-01), Yazaki
patent: 4982222 (1991-01-01), Rees
Fundamentals of Optics, Jenkins, et al., 1957, pp. 244-246.
Handbook of Synchrotron Radiation, vol. 1B, Chap. 13, pp. 1135-1136, Grobman, 1983.

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